AbstractThe surface composition of Ag xAuyPdz(x=0.1−0.6, y=0.3−0.8 and z=0.1−0.5) alloys affected by 2 keV argon ion bombardment were investigated as a function of alloy bulk composition. It was found that the ratio of component sputtering yields of tertiary alloys depends on the bulk composition of the alloy. The characteristics influences needed to achieve the steady state surface concentration are different for different types of atoms in the alloy and experimentally measured values are in the range (7.3−23.3)×1015 cm-2.
AbstractThe area of metal oxynitrides is poorly explored, and understanding of the fundamental mechanism that explains structural, mechanical, electrical, and optical properties is still insufficient. Therefore, the purpose of the present investigation is to analyze structural, electrical, and optical properties of ZrNxOy films deposited by reactive cathodic arc evaporation.Depending on the oxygen flow, cubic ZrN:O, monoclinic ZrO2:N, and tetragonal ZrO2:N phases films were prepared. The sheet resistance and the optical transmittance very much depend on the oxygen flow. Optical transparent ZrNxOy films with transmittance of 86% at 650 nm, the sheet resistance 1.1 · 103 Ω/sq, and the figure of merit 2 · 10− 4 Ω− 1 are deposited with the 60 sccm oxygen flow.