10 - MEMS for harsh environment sensors in aerospace applications: selected case studies
Review articleOpen access

Abstract:In this chapter we shall attempt to provide the reader with an understanding of what MEMS (micro-electromechanical systems) is and how it has become an enabling technology for some harsh environment aerospace applications, how it can contribute significantly to enhancing existing and future aerospace systems. We will explain what is meant by a harsh environment and how the engineer/scientist would need to accommodate his/her design to perform in this domain. Conveying this is perhaps best accomplished by presenting selected ‘case studies’, engineering examples of selected MEMS systems designed specifically for harsh environments in aerospace applications.

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