Superconductor microstructures
Review articleOpen access

AbstractThe past few years have seen major strides in the development of high resolution microfabrication technology and in the successful application of this technology to superconductivity research. High quality Josephson tunnel junctions have been fabricated with cross-sectional areas approaching 10−10 cm2 and with critical current densities as high as 106 amps/cm2. Such junctions are almost ideally suited for use in quantum noise limited dc SQUID and SIS submillimeter wave applications. Experiments with such junctions have also yielded new insight into the fundamental origin of 1/f noise in tunnel junctions. Microlithography has also been used to fabricate a structure consisting of two tunnel junctions produced side by side on a superconductor micro-strip where the spatial separation betweem the two junctions is less than 1500 Å. This geometry has proven useful in extreme non-equilibrium superconductivity experiments and in three-terminal superconductor device research.

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