Sputter deposition and magnetic properties of Mn-Zn ferrite films composed of (111) plane oriented crystallites
Review articleOpen access
Abstract:

AbstractMn-Zn ferrite thin films with soft magnetic properties composed of (111) plane well-oriented crystallites have been reproducibly prepared on c-axis well-oriented ZnO sputtered layers at low temperatures of about 400°C, using a Targets Facing Type of Sputtering(TFTS) system. The preparation process and soft magnetic properties have been investigated in detail.

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