Changes in surface composition induced by ion bombardment of multicomponent alloys
Review articleOpen access
Abstract:

AbstractThe surface composition of Ag xAuyPdz(x=0.1−0.6, y=0.3−0.8 and z=0.1−0.5) alloys affected by 2 keV argon ion bombardment were investigated as a function of alloy bulk composition. It was found that the ratio of component sputtering yields of tertiary alloys depends on the bulk composition of the alloy. The characteristics influences needed to achieve the steady state surface concentration are different for different types of atoms in the alloy and experimentally measured values are in the range (7.3−23.3)×1015 cm-2.

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