Long-term creep behavior of SU-8 membranes: Application of the time–stress superposition principle to determine the master creep compliance curve
Review articleOpen access
Abstract:

AbstractWe employ the concept of time–stress superposition on short-term creep tests to determine the master creep compliance curve of glassy SU-8. For the determination of the creep curves, the bulge test method is used. Rectangular membranes with a thickness of 2.25 μm, widths from 830 μm to 941 μm and a length of ≥6 mm are fabricated and measured. The chosen geometrical dimensions allow for the assumption of plane strain conditions. SU-8 exhibits rather low creep (≤10% at t = 1010 s) under constant equivalent stress of 13.2 MPa, where the initial value D0 and transient component De of the creep compliance are found to be 0.23 GPa−1 and 0.29 GPa−1, respectively. The fracture strength σf of the fully cured epoxy resin is measured to be 73.3 MPa. We report on modeling, fabrication, error analysis and experimental results.

Request full text

References (0)

Cited By (0)

No reference data.
No citation data.
Advertisement
Join Copernicus Academic and get access to over 12 million papers authored by 7+ million academics.
Join for free!