Effect of growth conditions on the Al composition and optical properties of AlxGa1 −xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy
Review articleOpen access
Abstract:

Highlights•AlxGa1 −xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy•Al content is varied by changing the trimethylaluminum (TMA) or trimethylgallium (TMG) flow rate•Al content increased by increasing (reducing) the TMA (TMG) flow rates.•Degeneration (improvement) in optical properties by increasing (reducing) the TMA (TMG) flow rates•Unexpected increase in the PL decay time is observed with decreasing TMG flow rates.

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